Recent progress in soft lithography
نویسندگان
چکیده
منابع مشابه
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We have studied the so-called roof collapse in soft lithography. Roof collapse is due to the adhesion between the PDMS stamp and substrate, and it may affect the quality of soft lithography. Our analysis accounts for the interactions of multiple punches and the effect of elastic mismatch between the PDMS stamp and substrate. A scaling law among the stamp modulus, punch height and spacing, and w...
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ژورنال
عنوان ژورنال: Materials Today
سال: 2005
ISSN: 1369-7021
DOI: 10.1016/s1369-7021(05)00702-9